Cost and time-efficient microdevice fabrication process for rarefied gas flow applications Academic Article

authors

publication date

December 1, 2024

published in

Physics of Fluids Journal

Digital Object Identifier (DOI)

https://doi.org/10.1063/5.0245358

has global citation frequency

https://vivo.tib.eu/demo/individual/gcf_W4405280654 Global Citation Count

volume

36

issue

12