3D micro-structures for rarefied gas flow applications manufactured via two-photon-polymerization Academic Article

authors

publication date

February 20, 2023

published in

Vacuum Journal

Digital Object Identifier (DOI)

https://doi.org/10.1016/j.vacuum.2023.111915

has global citation frequency

https://vivo.tib.eu/demo/individual/gcf_W4321366541 Global Citation Count

start page

111915

end page

111915

volume

211