Versatile stepper based maskless microlithography using a liquid crystal display for direct write of binary and multilevel microstructures Academic Article

authors

publication date

July 1, 2007

published in

Journal of Micro/Nanolithography MEMS and MOEMS Journal

Digital Object Identifier (DOI)

https://doi.org/10.1117/1.2767331

has global citation frequency

https://vivo.tib.eu/demo/individual/gcf_W2091017060 Global Citation Count

start page

033002

end page

033002

volume

6

issue

3