Metrology in a scanning electron microscope: theoretical developments and experimental validation Academic Article

authors

publication date

August 31, 2006

published in

Measurement Science and Technology Journal

Digital Object Identifier (DOI)

https://doi.org/10.1088/0957-0233/17/10/012

has global citation frequency

https://vivo.tib.eu/demo/individual/gcf_W2082460896 Global Citation Count

start page

2613

end page

2622

volume

17

issue

10